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E-book

Title Micro electro mechanical systems (MEMS) : technology, fabrication processes, and applications / editors, Britt Ekwall and Mikkel Cronquist
Published Hauppauge, N.Y. : Nova Science Publishers, [2010]
©2010

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Description 1 online resource
Series Nanotechnology science and technology
Nanotechnology science and technology series.
Bibliography Includes bibliographical references and index
Notes English
Description based on print version record
Subject Microelectromechanical systems.
TECHNOLOGY & ENGINEERING -- Mechanical.
Microelectromechanical systems
Form Electronic book
Author Ekwall, Britt
Cronquist, Mikkel
LC no. 2019721333
ISBN 9781613246986
1613246986