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E-book

Title Nanolithography and patterning techniques in microelectronics / edited by David G. Bucknall
Published Cambridge : Woodhead Pub. ; Boca Raton, FL : CRC Press, ©2005

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Description 1 online resource (xiv, 409 pages) : illustrations
Series Woodhead Publishing in materials
Woodhead Publishing in materials.
Contents Prelium; Contents; Block copolymer nanolithography; Surface-induced structure formation of polymer blends; Rapid prototyping of functional microfabricated devices by soft lithography; Chemomechanical surface modification of materials for patterning; Patterning of polymer thin films; Ion beam patterning; Nanofabrication by shadow deposition through nanostencils; Photolithography beyond the diffraction limit; Ink-jet printing as a tool in manufacturing and instrumentation; Actuators and patterns for microfluidic control; Manipulation of biomolecules and reactions
Summary Currently surface patterning is achieved by means of optical lithographic techniques but with industry moving towards the fabrication of devices with size features of 100 nm less, the technological community is looking for alternative approaches to materials fabrication at the nanoscale. By using nanolithography scientists can drive patterning currents through surfaces while building a 3D structure from a series of patterned layers. Electron induced chemical lithography can create ultra-high resolution templates for the site selective immobilisation of molecules, to form functional, hierarchic
Bibliography Includes bibliographical references and index
Notes English
Print version record
Subject Microlithography.
Nanotechnology.
TECHNOLOGY & ENGINEERING -- Electronics -- Circuits -- General.
Microlithography
Nanotechnology
Electrical Engineering.
Electrical & Computer Engineering.
Engineering & Applied Sciences.
Nanotecnologia.
Form Electronic book
Author Bucknall, David G.
LC no. 2006365086
ISBN 9781615831869
161583186X
9781855739314
1855739313
1845690907
9781845690908
128056833X
9781280568336
9786610568338
6610568332