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Author International Symposium on Measurement Technology and Intelligent Instruments (11th : 2013 : Aachen, Germany)

Title Measurement technology and intelligent instruments XI : selected, peer reviewed papers from the 11th International Symposium on Measurement Technology and Intelligent Instruments, (ISMTII 2013), July 1-3, 2013, Aachen, Germany / edited by Robert Schmitt and Harald Bosse
Published Zürich, Switzerland : Trans Tech Publications, 2014
©2014

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Description 1 online resource (491 pages) : illustrations
Series Key Engineering Materials, 1662-9795 ; Volume 613
Key engineering materials ; v. 613.
Contents Measurement Technology and Intelligent Instruments XI; Editorial; Table of Contents; Chapter 1: Metrology for SI; Revision of the SI: The Determination of the Avogadro Constant as the Base for the Kilogram; Characterizing the New Sphere Interferometer for the Diameter Determination of the Avogadro Spheres; New Avogadro Spheres for the Redefinition of the Kilogram; Recommendations for Unified Rules for Key Comparison Evaluation; Chapter 2: Position & Displacement Metrology; Reproducibility of a Nanometre Accurate Moving-Scale Measurement System
Error Separation and Dynamic Compensation Method in Coplanar Planar Grating Displacement Measurement SystemHighly-Stable Electronic Sensor Interface for Capacitive Position Measurement; Model and Measurement Method of Optical Nonlinearities Caused by the Heterodyne and Homodyne Interference Terms in the Heterodyne Interferometer; Orthogonality Measurement of Cross-Grating Based on Image Processing of Multi-Order Diffraction Patterns; Research on a Long Travel Nanopositioning Air Bearing Stage with the Linear Motors; Chapter 3: Micro- and Nanometrology
Changing Technology Requirements of Mask Metrology in Semiconductor IndustryAutomated Tool for Measuring Nanotopography of 300 mm Wafers at early Stages of Wafer Production; Full Scale Calibration of a Combined Tactile Contour and Roughness Measurement Device; A Virtual Instrument for SEM Uncertainty Analysis; Chapter 4: Macrometrology; Super-Large Gear Measurement Using Laser Tracker and CMM; Experimental Performance Study of Industrial-Grade Coordinate Measuring Machines Using a Calibrated Production Workpiece; Analysis of a Big Joint Implant
High Stability of Temperature Control Using Vacuum Insulated Wall for Gauge Block MeasurementChapter 5: Optical Metrology; First Utilization of Energy Transfer in Structured Light Projection -- Infrared 3D Scanner; High Precision Algorithms for 3D Objects Shadow Inspection in Partially Coherent Light; Measuring Parallelism for Two Thin Parallel Beams Based on Autocollimation Principle; Realization of Non-Mechanical Lateral and Axial Confocal Microscopic Laser Scanning with a Phase only Liquid Crystal Spatial Light Modulator
An Approach to On-Line Uncertainty Evaluation in Non-Contact Temperature MeasurementsChapter 6: Sensors and Actuators; Design and Testing of Wind Energy Harvester Based on PVDF; Investigation of Energy Harvest Using a Piezoelectric Unimorph Post-Buckled by a Stretching Spring; Development of a Compact Deformable Mirror Using Push-Pull Actuators; Self-Diagnostics of Piezoelectric Transducers; Evaluation of the Transient Temperature Distribution of End-Face Sliding Friction Pair Using Infrared Thermometry; IEEE 1451-Based Sensor Interfacing and Data Fusion for Fire Smoke Detection
Summary Collection of selected, peer reviewed papers from the 11th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2013), July 1-3, 2013, Aachen, Germany. The 60 papers are grouped as follows: Chapter 1: Metrology for SI, Chapter 2: Position & Displacement Metrology, Chapter 3: Micro- and Nanometrology, Chapter 4: Macrometrology, Chapter 5: Optical Metrology, Chapter 6: Sensors and Actuators, Chapter 7: Material Properties' Characterization, Chapter 8: Intelligent Instruments for Automation, Chapter 9: Management of Measurement Processes, Chapter 10: Calibration and Machine Tool Performance, Chapter 11: Trends in Production Technology, Chapter 12: Measurements, Modeling and Simulation in the Humanitarian Field
Bibliography Includes bibliographical references at the end of each chapters and indexes
Notes Online resource; title from PDF title page (ebrary, viewed June 20, 2014)
Subject Engineering instruments -- Congresses
Measuring instruments -- Congresses
TECHNOLOGY & ENGINEERING -- Engineering (General)
TECHNOLOGY & ENGINEERING -- Reference.
Engineering instruments
Measuring instruments
Genre/Form Conference papers and proceedings
Form Electronic book
Author Schmitt, Robert (Engineer), editor
Bosse, Harald, editor.
ISBN 9783038264934
3038264938