| Description |
1 online resource |
| Series |
Micro & nano technologies |
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Micro & nano technologies.
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| Contents |
Front Cover; Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology; Copyright; Dedication; Contents; About the Author; Foreword; Preface; Acknowledgment; Symbols; CHAPTER 1 -- INTRODUCTION; 1.1 MICROMACHINING AND NANOFABRICATION; 1.2 MEMS AND MICROSYSTEMS; 1.3 CONDITIONS FOR MICROMACHINING AND NANOFABRICATION; 1.4 TYPES OF MICROMACHINING PROCESSES; 1.5 ELECTROCHEMICAL MICROMACHINING; 1.6 ELECTROCHEMICAL TECHNOLOGY FOR MICROSYSTEMS AND NANOFABRICATION; REFERENCES; CHAPTER 2 -- ELECTROCHEMICAL MACHINING: MACRO TO MICRO; INTRODUCTION; 2.1 BACKGROUND OF ECM |
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2.2 FUNDAMENTALS OF ANODIC DISSOLUTION2.3 IMPORTANT INFLUENCING FACTORS OF ECM FOR MICROMACHINING; 2.4 EMM: PRESENT STATUS; REFERENCES; CHAPTER 3 -- PRINCIPLE OF MATERIAL REMOVAL IN ELECTROCHEMICAL MICROMACHINING; 3.1 MECHANISM OF MATERIAL REMOVAL; 3.2 EQUIVALENT ELECTRICAL CIRCUIT FOR EMM; 3.3 MRR MODEL; REFERENCES; CHAPTER 4 -- TYPES OF EMM; INTRODUCTION; 4.1 THROUGH-MASK EMM; 4.2 MASKLESS EMM; 4.3 THREE-DIMENSIONAL EMM; REFERENCES; CHAPTER 5 -- ELECTROCHEMICAL MICROMACHINING SETUP; 5.1 DETAILS OF EMM SETUP; 5.2 CURRENT STATUS OF DEVELOPMENTS IN EMM SETUP; 5.3 IEG CONTROL STRATEGY; REFERENCES |
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CHAPTER 6 -- DESIGN AND DEVELOPMENTS OF MICROTOOLSINTRODUCTION; 6.1 TYPES OF EMM TOOLS; 6.2 MICROTOOL DESIGN FOR EMM; 6.3 METHODS OF MICROTOOL FABRICATION; 6.4 EMM FOR MICROTOOL FABRICATION; 6.5 DIFFERENT FEATURES OF MICROTOOLS FABRICATED BY EMM; REFERENCES; CHAPTER 7 -- INFLUENCING FACTORS OF EMM; INTRODUCTION; 7.1 EMM POWER SUPPLY; 7.2 ELECTROLYTE FOR EMM; 7.3 INFLUENCE OF IEG; 7.4 INFLUENCE OF TEMPERATURE, CONCENTRATION, AND ELECTROLYTE FLOW; 7.5 INFLUENCE OF TOOL FEED RATE; REFERENCES; CHAPTER 8 -- IMPROVEMENT OF MACHINING ACCURACY; INTRODUCTION; 8.1 TOOL INSULATION |
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8.2 ELECTROLYTE CIRCULATION8.3 SHAPE OF THE MICROTOOL; 8.4 TOOL MOVEMENT STRATEGY; 8.5 STRAY CURRENT AND MICROSPARKS PHENOMENA IN EMM; 8.6 HYBRID EMM; 8.7 SELECTION OF COMBINATION OF MACHINING PARAMETERS; REFERENCES; CHAPTER 9 -- ADVANTAGES, LIMITATIONS, AND APPLICATIONS OF EMM; INTRODUCTION; 9.1 ADVANTAGES; 9.2 APPLICATIONS; 9.3 LIMITATIONS AND REMEDIES; REFERENCES; CHAPTER 10 -- MICRODEVICES FABRICATION FOR MICROELECTROMECHANICAL SYSTEMS AND OTHER MICROENGINEERING APPLICATIONS; INTRODUCTION; 10.1 MICROELECTROMECHANICAL SYSTEMS; 10.2 SEMICONDUCTOR MICROMACHINING BY EMM |
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10.3 MICROENGINEERING APPLICATIONSREFERENCES; CHAPTER 11 -- ELECTROCHEMICAL MICROSYSTEM TECHNOLOGY; INTRODUCTION; 11.1 FEATURES OF EMST; 11.2 SCALING DOWN AND SCALING UP; 11.3 ELECTROCHEMICAL MICROCELL AND MICROELECTRODE; 11.4 ELECTROCHEMICAL REACTIONS IN EMST; 11.5 APPLICATIONS OF EMST IN MICROSYSTEM TECHNOLOGY; REFERENCES; CHAPTER 12 -- RECENT ADVANCEMENTS IN EMM FOR MICRO AND NANOFABRICATION; INTRODUCTION; 12.1 WIRE EMM; 12.2 SOLID-STATE EMM; 12.3 SURFACE STRUCTURING; 12.4 ELECTROCHEMICAL WET STAMPING; 12.5 ELECTROCHEMICAL PATTERNING BY ENFACE TECHNOLOGY; 12.6 NANOFABRICATION BY EMM |
| Summary |
Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM |
| Bibliography |
Includes bibliographical references |
| Notes |
Vendor-supplied metadata |
| Subject |
Micromachining.
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Nanotechnology.
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Microelectromechanical systems.
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Micro-Electrical-Mechanical Systems
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Nanotechnology
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TECHNOLOGY & ENGINEERING -- Engineering (General)
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TECHNOLOGY & ENGINEERING -- Reference.
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Microelectromechanical systems
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Micromachining
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Nanotechnology
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| Form |
Electronic book
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| ISBN |
9780323352888 |
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032335288X |
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