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Book Cover
E-book
Author Bhattacharyya, Bijoy, author

Title Electrochemical micromachining for nanofabrication, MEMS and nanotechnology / Bijoy Bhattacharyya
Published Oxford, UK : William Andrew, an imprint of Elsevier, [2015]
©2015
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Description 1 online resource
Series Micro & nano technologies
Micro & nano technologies.
Summary Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM
Bibliography Includes bibliographical references
Notes Vendor-supplied metadata
Subject Microelectromechanical systems.
Micromachining.
Nanotechnology.
Form Electronic book
ISBN 032335288X (electronic bk.)
9780323352888 (electronic bk.)