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Authors (Last name first) (1-2 of 2)
Babu, S. V.,
1
2016
Advances in chemical mechanical planarization (CMP)
Waltham, MA : Woodhead Publishing, [2016]
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2
2022
Advances in chemical mechanical planarization (CMP)
Second edition
Duxford, United Kingsom : Woodhead Publishing, 2022
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