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Book Cover

Title Handbook of thin film technology / Hartmut Frey, H.R. Khan, editors
Published Berlin : Springer, 2015
Online access available from:
ProQuest Ebook Central (owned titles)    View Resource Record  


Description 1 online resource
Series Online access with purchase: Springer (t)
Contents Applications and developments of thin film technology -- Importance of the vacuum technology for thin film coatings -- Evaporation in the vacuum -- Basic principle of plasma physics -- Gaseous phase and surface processes -- Coating by cathode sputtering -- Plasma treatment methods -- Ion beam-supported procedures -- Chemical Vapor Deposition (CVD) -- Physical basics of modern methods of surface and thin film analysis -- Measurements of thin layers during the coating -- Measurements of thin layers after terminated coating process -- Nanoparticle Films -- Optical properties of thin films
Summary ĹℓHandbook of Thin Film Technologyℓ́ℓ covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films
Notes Includes index
Print version record
Subject Thin films -- Handbooks, manuals, etc.
Genre/Form Handbooks and manuals.
Handbooks and manuals.
Form Electronic book
Author Frey, Hartmut, editor
Khan, H. R., editor
ISBN 3642054307 (electronic bk)
9783642054303 (electronic bk)