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Book Cover
E-book

Title Handbook of optical metrology : principles and applications / edited by Toru Yoshizawa
Edition Second edition
Published Boca Raton : CRC Press, Taylor & Francis Group, [2015]
©20
©2015

Copies

Description 1 online resource (xiii, 905 pages) : illustrations
Contents Chapter 1: Light Sources; Chapter 2: Lenses, Prisms, and Mirrors; Chapter 3: Optoelectronic Sensors; Chapter 4: Optical Devices and Optomechanical Elements; Chapter 5: Propagation of Light; Chapter 6: Interferometry; Chapter 7: Holography; Chapter 8: Speckle Methods and Applications; Chapter 9: Moir©♭ Metrology; Chapter 10: Optical Heterodyne Measurement Method; Chapter 11: Diffraction; Chapter 12: Light Scattering; Chapter 13: Polarization; Chapter 14: Near-Field Optics
Chapter 15: Length and SizeChapter 16: Displacement; Chapter 17: Straightness and Alignment; Chapter 18: Flatness; Chapter 19: Surface Profilometry; Chapter 20: Three-Dimensional Shape Measurement; Chapter 21: Fringe Analysis; Chapter 22: Photogrammetry; Chapter 23: Optical Methods in Solid Mechanics; Chapter 24: Optical Methods in Flow Measurement; Chapter 25: Polarimetry; Chapter 26: Birefringence Measurement; Chapter 27: Ellipsometry; Chapter 28: Optical Thin Film and Coatings; Chapter 29: Film Surface and Thickness Profilometry
Chapter 30: Optical Coherence Tomography for Industrial ApplicationsChapter 31: Interference Microscopy for Surface Structure Analysis; Chapter 32: Noncontact Dimensional and Profile Metrology by Video Measurement; Chapter 33: Optical Metrology in Manufacturing Technology; Chapter 34: On-Machine Measurements
Bibliography Includes bibliographical references and index
Notes Online resource; title from PDF title page (Ebsco, viewed April 7, 2015)
Subject Optical measurements -- Handbooks, manuals, etc
Metrology -- Handbooks, manuals, etc
TECHNOLOGY & ENGINEERING -- Technical & Manufacturing Industries & Trades.
TECHNOLOGY & ENGINEERING -- Sensors.
Metrology
Optical measurements
Genre/Form Electronic books
handbooks.
Handbooks and manuals
Handbooks and manuals.
Guides et manuels.
Form Electronic book
Author Yoshizawa, Tōru, 1939- editor.
ISBN 9781466573611
1466573619