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Title Chemical solution deposition of functional oxide thin films / Theodor Schneller [and others], editors
Published Wien : Springer, 2013


Description 1 online resource : illustrations
Contents Solution Chemistry. Simple Alkoxide Based Precursor Systems / Theodor Schneller -- Carboxylate Based Precursor Systems / Theodor Schneller, David Griesche -- Mixed Metallo-organic Precursor Systems / Barbara Malič, Sebastjan Glinšek, Theodor Schneller and Marija Kosec -- Single Source Precursor Approach / Vadim G. Kessler -- Aqueous Precursor Systems / Marlies K. Van Bael, An Hardy and Jules Mullens -- Polymer-Assisted Deposition / Anthony K. Burrell, Thomas M. McCleskey and Quanxi Jia -- Analytical Methods. Thermal Analysis / Barbara Malič, Alja Kupec and Marija Kosec -- X-Ray Absorption Spectroscopy / Irene Schlipf, Matthias Bauer and Helmut Bertagnolli -- Infrared Spectroscopy / Maria Zaharescu and Oana Cătălina Mocioiu -- Deposition Techniques. Dip Coating / C. Jeffrey Brinker -- Spin Coating: Art and Science / Dunbar P. Birnie III -- Aerosol Deposition / Matt D. Brubaker -- Inkjet Printing and Other Direct Writing Methods / Paul G. Clem and Nelson S. Bell -- Chemical Bath Deposition / Mark R. De Guire, Luciana Pitta Bauermann, Harshil Parikh and Joachim Bill -- Processing and Crystallization. Thermodynamics and Heating Processes / Robert W. Schwartz and Manoj Narayanan -- Epitaxial Films / Fred Lange -- Orientation and Microstructure Design / Susanne Hoffmann-Eifert and Theodor Schneller -- Low-Temperature Processing / Sebastjan Glinšek, Barbara Malič and Marija Kosec -- Composite Film Processing / Robert Dorey, Subhasis Roy, A. Sharma, Chandan Ghanty and Subhasish B. Majumder -- UV and E-Beam Direct Patterning of Photosensitive CSD Films / Kiyoharu Tadanaga and Mohammad S.M. Saifullah -- Template Controlled Growth / Sven Clemens and Theodor Schneller -- Functions and Applications. Thin Film Multilayer Capacitors / Hiroyuki Kambara, Theodor Schneller and Rainer Waser -- Base Metal Bottom Electrodes / Jon F. Ihlefeld, Mark D. Losego and Jon-Paul Maria -- Polar Oxide Thin Films for MEMS Applications / Paul Muralt -- Conducting Oxide Thin Films / Camilla Haavik and Per Martin Rørvik -- Transparent Conducting Oxides / Peer Löbmann -- Superconducting Films / Michael Bäcker, Martina Falter, Oliver Brunkahl and Bernhard Holzapfel -- Antireflective Coatings and Optical Filters / Peer Löbmann -- Luminescent Thin Films: Fundamental Aspects and Practical Applications / Shinobu Fujihara
Introduction -- Solution Chemistry; Simple alskoxide based precursor systems; Carboxylate based precursor systems; Single-source precursors; Acqueos Precursor Systems; Solution Synthesis Strategies -- Analytical Methods; Introduction; Thermal Analysis; NMR Sepctroscopy; EXAFS; Other Methods (XRM, SEM, TEM;scattering methods at nanocrystalline films); Spin-Coating; Dip Coating; Inkjet Printing and Other Direct Writing Methods(dip point and imprint techniques); Chemical Bath Deposition; Polymer Assisted Deposition -- Processing and Crystallization; Thermodynamics and Heating Processes; Material Systems Dominated by Heterogeneous Nucleation; Material Systems Dominated by Homogeneous Nucleation; Low Temperature Processing; Epitaxial Films; Powder Assisted Film Fabrication; UV-and E-Beam Direct Patterning of Photosensitive CSD Films; Template Controlled Growth -- Functions and Applications; Introduction; Integrated Capacitors; Base Metal Electrodes; Polar Oxide Films for MEMS Applications;Conducting Films and Electrodes; Transparent conducting oxides; Superconducting Films; Porous Films for Gas Sensors; Luminescent Fims -- Appendix; Synthesis for Standard material Systems
Summary This is the first text to cover all aspects ofsolution processedfunctional oxide thin-films. Chemical Solution Deposition (CSD) comprises all solution based thin- film deposition techniques, which involve chemical reactions of precursors during the formation of the oxide films, i. e. sol-gel type routes, metallo-organic decomposition routes, hybrid routes, etc. While the development of sol-gel type processes for optical coatings on glass by silicon dioxide and titanium dioxide dates from the mid-20th century, the first CSD derived electronic oxide thin films, such as lead zirconate titanate, were prepared in the 1980s. Since then CSD has emerged as a highly flexible and cost-effective technique for the fabrication of a very wide variety of functional oxide thin films. Application areas include, for example, integrated dielectric capacitors, ferroelectric random access memories, pyroelectric infrared detectors, piezoelectric micro-electromechanical systems, antireflective coatings, optical filters, conducting-, transparent conducting-, and superconducting layers, luminescent coatings, gas sensors, thin film solid-oxide fuel cells, and photoelectrocatalytic solar cells. In the appendix detailed cooking recipes for selected material systems are offered
Bibliography Includes bibliographical references and index
Notes Print version record
Subject Thin films.
Plating baths.
Science des matériaux.
Plating baths
Thin films
Form Electronic book
Author Schneller, Theodor, editor
ISBN 9783211993118