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Subjects (1-4 of 4)
Chemical mechanical planarization.
1
E-book
2016

Advances in chemical mechanical planarization (CMP)




Waltham, MA : Woodhead Publishing, [2016]

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2
E-book
2022

Advances in chemical mechanical planarization (CMP)



Second edition
Duxford, United Kingsom : Woodhead Publishing, 2022

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3
E-book
2019

Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices


Paik, Ungyu.

[Place of publication not identified] : CRC Press, 2019

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4
E-book
2018

Research on chemical mechanical polishing mechanism of novel diffusion barrier Ru for Cu interconnect


Cheng, Jie (Researcher in chemical mechanical planarization), author.

Singapore : Springer, [2018]

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