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Subjects (1-4 of 4)
Chemical mechanical planarization.
1
2016
Advances in chemical mechanical planarization (CMP)
Waltham, MA : Woodhead Publishing, [2016]
Rating:
Electronic Resources
2
2022
Advances in chemical mechanical planarization (CMP)
Second edition
Duxford, United Kingsom : Woodhead Publishing, 2022
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Electronic Resources
3
2019
Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices
Paik, Ungyu.
[Place of publication not identified] : CRC Press, 2019
Rating:
Electronic Resources
4
2018
Research on chemical mechanical polishing mechanism of novel diffusion barrier Ru for Cu interconnect
Cheng, Jie (Researcher in chemical mechanical planarization), author.
Singapore : Springer, [2018]
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Electronic Resources
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