Title Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council

Published Washington, D.C. : National Academy Press, 1992

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Description 1 online resource (xii, 89 pages) : illustrations Analysis Microelectronics Materials Microelectronics industry Molecular Industrial applications Plasma-enhanced Industrial applications Notes "NMAB-461." Bibliography Includes bibliographical references Notes Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL Print version record digitized 2010 HathiTrust Digital Library committed to preserve pda MiAaHDL Subject Microelectronics industry. Molecular beams -- Industrial applications Microelectronics -- Materials Plasma-enhanced chemical vapor deposition -- Industrial applications TECHNOLOGY & ENGINEERING -- Electronics -- Microelectronics. TECHNOLOGY & ENGINEERING -- Electronics -- Digital. Microelectronics industry Microelectronics -- Materials Molecular beams -- Industrial applications Plasma-enhanced chemical vapor deposition -- Industrial applications Genre/Form Electronic book Form Electronic book LC no. 92060205 ISBN 0585149453 9780585149455

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