Title Microelectromechanical systems : advanced materials and fabrication methods / Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council

Published Washington, DC : National Academy Press, 1997

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Description 1 online resource (xiv, 61 pages) : illustrations Analysis Andre fag (naturvidenskab og teknik) Andre fag Bibliography Includes bibliographical references (pages 51-55) Notes Print version record Subject Microelectronics -- Materials Microelectromechanical systems -- Design and construction TECHNOLOGY & ENGINEERING -- Electronics -- Microelectronics. TECHNOLOGY & ENGINEERING -- Electronics -- Digital. Microelectromechanical systems -- Design and construction Microelectronics -- Materials Genre/Form Electronic books Form Electronic book Author National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems. National Research Council (U.S.). National Materials Advisory Board. National Research Council (U.S.). Commission on Engineering and Technical Systems. ISBN 0309059801 9780309059800 0585002509 9780585002507 9786610187096 6610187096

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