Title Defects in high-k gate dielectric stacks : nano-electronic semiconductor devices / edited by Evgeni Gusev

Published Dordrecht : Springer, ©2006

Click on the following:
Springer eBooks
Springer Engineering eBooks

Copies

Description 1 online resource (x, 492 pages) : illustrations Series NATO science series. Series II, Mathematics, physics and chemistry ; v. 220 NATO science series. Series II, Mathematics, physics, and chemistry ; v. 220. Contents High-k technology -- Defects in high-k dielectrics : characterization -- High-k processing and defects -- High-k theory -- Electrically active defects -- Interfaces -- Processing, characterization and devices Summary The goal of this NATO Advanced Research Workshop (ARW) entitled "Defects in Advanced High-k Dielectric Nano-electronic Semiconductor Devices", which was held in St. Petersburg, Russia, from July 11 to 14, 2005, was to examine the very complex scientific issues that pertain to the use of advanced high dielectric constant (high-k) materials in next generation semiconductor devices. The special feature of this workshop was focus on an important issue of defects in this novel class of materials. One of the key obstacles to high-k integration into Si nano-technology are the electronic defects in high-k materials. It has been established that defects do exist in high-k dielectrics and they play an important role in device operation. However, very little is known about the nature of the defects or about possible techniques to eliminate, or at least minimize them. Given the absence of a feasible alternative in the near future, well-focused scientific research and aggressive development programs on high-k gate dielectrics and related devices must continue for semiconductor electronics to remain a competitive income producing force in the global market Analysis engineering condenseren condensation computertechnieken computer techniques elektrotechniek electrical engineering elektronica electronics instrumentatie instrumentation fysica physics Engineering (General) Techniek (algemeen) Bibliography Includes bibliographical references and indexes Notes English Print version record In OhioLINK electronic book center SpringerLink Subject Gate array circuits -- Congresses Dielectrics -- Congresses Semiconductors -- Defects -- Congresses COMPUTERS -- Logic Design. Dielectrics. Semiconductors -- Defects. Gate array circuits. Ingénierie. Dielectrics Gate array circuits Semiconductors -- Defects Genre/Form proceedings (reports) Conference papers and proceedings Conference papers and proceedings. Actes de congrès. Form Electronic book Author Gusev, Evgeni. ISBN 9781402043673 1402043678 1402043651 9781402043659 9781402043673 661046118X 9786610461189

  Permalink